通过在弱酸环境的水溶液条件下加入非离子表面活性剂辛基苯基聚氧乙烯醚,缓蚀剂焦磷酸二氢二钠和苯并三氮唑(BTA),并结合超声波的湿化学清洗方法,对化学机械抛光(CMP)后的7003铝合金表面的清洗进行了研究.利用扫描电子显微镜(SEM)和原子力显微镜(AFM)对清洗前后铝合金表面形貌进行对比分析.研究结果表明,辛基苯基聚氧乙烯醚能够保持颗粒和表面之间处于容易清洗的物理吸附状态,结合超声波协同作用可以对铝合金表面残留的SiO2颗粒进行有效的清洗.在一定范围内随着活性剂质量分数的递增,表面清洗效果逐渐改善,当质量分数为2%时,表面残留的SiO2颗粒基本被清洗干净,得到最优表面且未发生腐蚀现象.清洗后表面形成活性剂保护层,防止了颗粒的再次吸附.
With the wet chemical cleaning method and ultrasonic in the weak acid aqueous solution, the cleaning of the 7003 aluminum alloy surface after chemical mechanical polishing (CMP) was investigated.The cleaning slurry are mainly composed of the non-ionic surfactant, polyoxyethylene octylphenyl ether, and corrosion inhibitors, disodium dihydrogen pyrophosphate and benzotriazole (BTA).With scanning electron microscope (SEM) and atomic force microscope (AFM) analysis, it is found that polyoxyethylene octylphenyl ether could keep SiO2 particles in the state of physical adsorption which could easily be removed from the surface, combining with ultrasonic synergy.With the increasing mass fraction of surfactant, particles removal efficiency gradually improved.When the mass fraction increased to 2%, the SiO2 particles remaining on the surface are substantially removed, and no corrosion phenomenon happens.Besides these, surfactant layer was formed on surface after cleaning, which could prevent the particles adsorption again.
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