由于微米/纳米机电系统(MEMS/NEMS)尺寸方面的特点和制造方面的原因,当对其施加一静电场时,它除了受到静电力外还不可避免地受到真空量子效应力(Casimir力)和残余应力的作用.在这3种力的联合作用下,其变形行为也变得极为复杂.本文导出了微米/纳米微机电系统中桥式薄膜结构在这3种力联合作用下的挠度解析表达式.在不同条件下对其解进行了分析讨论.结果表明:大的残余拉应力将促使微桥薄膜的挠度出现波状行为.
As electric field is applied, the behaviors of micro / nano-electromechanical systems become complicated due to the unavoidable mutual actions of Casimir force, residual stresses and electrostatic force in the system. Analytical expressions of the deflection of a bridge shaped device under the mutual actions of these forces in the systems are derived. It is shown that the rather great tensile residual stress enhances wavy behavior of the deflection.
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