综述了合金薄膜应变压力传感器的现状、发展趋势、技术关键及应用情况.合金敏感薄膜电阻在应变压?技 力传感器上的应用克服了粘贴式应变压力传感的缺点,使压力传感器结构更精细,性能更优越,适应各种恶劣环境测量压力的要求.
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