CSS法制备CdZnTe薄膜时衬底温度的影响规律

功能材料, 2011, 42(5): 890-893.

CSS法制备CdZnTe薄膜时衬底温度的影响规律

袁妍妍 ^1, , 介万奇 ^2, , 高俊宁 ^3, , 查钢强 ^4,

1.西北工业大学,凝固技术国家重点实验室,陕西,西安,710072

2.西北工业大学,凝固技术国家重点实验室,陕西,西安,710072

3.西北工业大学,凝固技术国家重点实验室,陕西,西安,710072

4.西北工业大学,凝固技术国家重点实验室,陕西,西安,710072

基金项目: 国家自然科学基金(50902113;50902114;50772091)

关键词： CdZnTe薄膜 , 近空间升华法 , 太阳能电池 , 形貌 , 结构

The effects of growth temperature on the properties of Cd1xZnxTe prepared by close-spaced sublimation

采用近空间升华法(close-spaced sublimation,CSS),以CdZnTe化合物粉料为原料制备了CdZnTe薄膜,采用XRD、SEM、紫外光谱仪等对其进行了性能表征,并研究了不同生长温度对薄膜生长速率、结构、Zn含量和光学特性的影响规律.研究结果表明,薄膜的生长速率随着生长温度的升高而增大,且温度>528℃时生长速率迅速增大;不同温度下制备的CdZnTe薄膜结构均为立方相,且都表现出沿(111)晶面的择优生长,高温时择优取向更强一些;晶粒尺寸随着温度升高而增大,在438℃时颗粒尺寸约为1μm,而568℃时约为20tμm;薄膜禁带宽度受温度影响不大,在1.49～1.51eV之间.

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CSS法制备CdZnTe薄膜时衬底温度的影响规律

The effects of growth temperature on the properties of Cd1xZnxTe prepared by close-spaced sublimation

参考文献