Ion beam sputtering profiling in combination with SIMS technique was employed to investigate the Al diffusion in Fe_(78)Si_0B_(13)amorphous alloy.Between 320 and 380℃,the diffusion coefficients vary from 2.43×10~(-22) to 2.01×10~(-21)m~2s~(-1),and an Arrhenius relationship was established as:D_0=2.02×10~_(12)exp(-1.17/kT)
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