采用中频非平衡磁控溅射方法在箔片空气轴承的主轴材料40Cr钢、支承元件铍青铜箔片及硅片上制备了钛掺杂的DLC膜,并对膜的结构、摩擦磨损性能、结合强度以及内应力等进行了表征.结果表明:所制备的DLC膜含有较多的sp2键,与基体结合力强,两种轴承材料上沉积DLC膜之间的摩擦配副的减摩抗磨效果较好,摩擦因数在0.06～0.08,磨损率为4.8×10<'-8>mm3·N<'-1>·m<'-1>,可用于箔片空气轴承表面的固体润滑.
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