CVD自支撑金刚石薄膜微观孪晶的EBSD研究

物理测试, 2008, 26(4): 1-0.

CVD自支撑金刚石薄膜微观孪晶的EBSD研究

朱宏喜 , 毛卫民 , 吕反修 , 李全安 , 郭辉

1.1.河南科技大学材料科学与工程学院,河南洛阳 471003；2.河南省有色金属材料科学与加工技术重点实验室，河南洛阳 471003

3.3.北京科技大学材料科学与工程学院，北京 100083

4. 4.北京科技大学功能材料研究所,北京 100083；5.河北省激光研究所，河北石家庄 050081

2. 2.Henan Key Laboratory of Advanced Nonferrous Metals,Luoyang 471003,Henan,China

3. 3.University of Science and Technology Beijing 100083,China

4.4.Institute of Functional Materials,University of Science and Technology Beijing,100083,China

5. 5.Hebei Institute of Laser,Shijiazhuang 050081,Hebei,China

关键词：金刚石薄膜 , twin , electron backscatter diffraction , misorientation , texture

Microtwins in CVD Free Standing Diamond Films Studied by EBSD

ZHU Hongxi , MAO Weimin , LU Fanxiu , LI Quanan , GUO Hui

Keywords： diamond film , 孪晶 , 电子背散射衍射 , 取向差 , 织构

利用电子背散射衍射、扫描电镜和X射线衍射技术研究了CVD自支撑金刚石薄膜的孪晶组织形貌、孪晶界和晶体取向差分布。研究表明，金刚石薄膜中存在一阶和二阶孪晶，不同的孪晶取向转变过程能形成不同的孪晶组织形貌，高频率的孪晶能对薄膜织构产生明显影响。

The twin morphology, twin grain boundary and misorientations distribution in CVD free standing diamond films were investigated by electron backscatter diffraction, SEM and X ray diffraction technology. The results show there are firstorder and secondorder twins in diamond films, different twin morphology can be formed for different process of twin orientation transformation，texture will be effected obviously by the high frequency twins.

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