The morphology and microstructure of magnetron sputtered coating of superalloy K38G on cast al- loy K38G have been investigated by means of SEM, TEM and XRD. The results indicate that the sputtered coating is identical to the substrate in chemical composition but it is composed only of γ phase without γ'. The sputtered superalloy coating presents columnar structure and the grain size is in the range of 20-100 nm. There are a great number of planar defects such as stacking faults and microtwins in the coating. The morphology and microstructure of the sputtered coating may have close relation to the remarkable increase of oxidation resistance of the coating.
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