从电极过程液相传质特性、电沉积行为特性和电沉积工艺特性3方面综述了超声波对电沉积过程的影响:在一定条件下,超声波能加速扩散传质过程,减薄扩散层,提高阴极极限电流密度和电沉积速度,改善沉积层的表面形貌和综合性能,并且改变微观织构及粒子与合金的含量.当前,开展的超声电化学沉积研究主要集中于宏观沉积层和低深宽比微米级尺度结构层面,今后高深宽比微米级特征尺度结构及纳米尺度结构的实现乃至优质制造或将成为新的研究热点.
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