目前,对TiAlSiN薄膜在800℃以上的抗高温氧化性研究较少.通过磁控溅射优化工艺在W18Cr4V高速钢基体上制备不同Si含量的TiAlSiN硬质薄膜,针对硬度最高的典型薄膜试样[Si含量为16.49％(原子分数)],分别在800℃和1 000℃下进行保温1h的大气热处理.利用SEM、EDS、XRD和纳米压痕仪对薄膜的形貌、成分、相结构和硬度等进行表征.结果表明:随着Si含量从无到有并增加,薄膜硬度呈现上升-下降-上升-陡降-缓降的趋势,当Si含量为16.48％(原子分数)时,薄膜硬度达到最大值26.43 GPa,薄膜由(Ti,Al)N和Si3N4构成复合结构;经800C大气热处理后薄膜表面生成大量的Al2O3,同未热处理试样相比,表面较为致密和平整;经1 000℃大气热处理后,膜层中的Ti、Al和Si元素外扩散形成TiO2和Ti2O3等多种氧化产物,导致薄膜表面凹凸不平,甚至剥落,薄膜硬度和抗氧化效果明显下降.
参考文献
| [1] | Carvalho S.;Rebouta L.;Ribeiro E.;Vaz E.;Denannot MF.;Pacaud J. Riviere JR.;Paumier E.;Gaboriaud RJ.;Alves E..Microstructure of (Ti,Si,Al)N nanocomposite coatings[J].Surface & Coatings Technology,20040(0):369-375. |
| [2] | A. Mileti?;P. Panjan;B. ?kori?;M. ?ekada;G. Dra?i?;J. Kova?.Microstructure and mechanical properties of nanostructured Ti–Al–Si–N coatings deposited by magnetron sputtering[J].Surface & Coatings Technology,2014:105-111. |
| [3] | Chi-Lung Chang;Jyh-Wei Lee;Ming-Don Tseng.Microstructure, corrosion and tribological behaviors of TiAlSiN coatings deposited by cathodic arc plasma deposition[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,200917(17):5231-5236. |
| [4] | Donghai Yu;Chengyong Wang;Xiaoling Cheng;Fenglin Zhang.Microstructure and properties of TiAlSiN coatings prepared by hybrid PVD technology[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,200917(17):4950-4955. |
| [5] | 彭笑;朱丽慧;Vineet Kumar;刘一雄.PVD制备TiAlSiN涂层的研究进展[J].材料导报,2014(3):42-44,74. |
| [6] | D. Philippon;V. Godinho;P. M. Nagy;M. P. Delplancke-Ogletree;A. Fernandez.Endurance of TiAlSiN coatings: Effect of Si and bias on wear and adhesion[J].Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear,20117/8(7/8):541-549. |
| [7] | Fukumoto, N;Ezura, H;Suzuki, T.Synthesis and oxidation resistance of TiAlSiN and multilayer TiAlSiN/CrAlN coating[J].Surface & Coatings Technology,20096/7(6/7):902-906. |
| [8] | Xie, Z.W.;Wang, L.P.;Wang, X.F.;Huang, L.;Lu, Y.;Yan, J.C..Influence of oxidation on the structural and mechanical properties of TiAlSiN coatings synthesized by multi-plasma immersion ion implantation and deposition[J].Nuclear Instruments and Methods in Physics Research, Section B. Beam Interactions with Materials and Atoms,2012:1-5. |
| [9] | Zhu, L.;Hu, M.;Ni, W.;Liu, Y..High temperature oxidation behavior of Ti _(0.5)Al _(0.5)N coating and Ti _(0.5)Al _(0.4)Si _(0.1)N coating[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,201212(12):1795-1799. |
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