以双氧水和V2O5粉末为前驱体制备出V2O5溶胶,然后在云母基底上成膜,通过后续热处理退火得到优异相变性能的VO2薄膜.采用SEM、XRD分析薄膜形貌和微观结构,利用FT-IR等检测薄膜的光学性质.实验表明,VO2薄膜在云母基底上沿(011)晶面择优取向生长,颗粒生长致密且大小分布均匀.薄膜具有优异的相变陡然性,相变温度及滞后温宽都较低.在红外波段,相变前后透过率及反射率变化都较大,对红外光调节性能较好；在可见光波段,薄膜在相变前后都具有较高可见光透过率.
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