利用电弧离子镀技术在1Cr18Ni9Ti基材上低温沉积Ti-Al-N涂层，研究氮气流量及热处理工艺对涂层微观组织结构的影响。结果表明，沉积态涂层中不含三元层状陶瓷Ti2AlN MAX相，可能含有Ti3AlN（反钙钛矿结构）、TiN、α-Ti、fcc-Al及TixAly金属间化合物等。涂层经退火后在一定条件下可以形成Ti2AlN。涂层中的N元素含量及退火温度对Ti2AlN的形成起到重要作用。N元素含量过多不利于Ti2AlN的形成；提高退火温度可以促进Ti2AlN的形成。透射电镜（TEM）分析结果表明，退火过程中Ti2AlN的形成伴随着涂层微观组织结构的转变，从明显的层状结构转变为细小的等轴晶结构。
In the present work, Ti-Al-N coatings were deposited on 1Cr18Ni9Ti substrates at a low synthesis temperature using arc ion plating(AIP). The effects of nitrogen flow rate and post-heat treatment on the microstructure of the coatings were investigated. The results show that no Ti2AlN phase forms in all the as-deposited coatings. The coatings are possibly composed of Ti3AlN inverse perovskite phase, TiN, α-Ti, fcc-Al and TixAly intermetallic phase. Ti2AlN phase can be detected in the annealed coatings in a given condition. It has been found that the nitrogen concentration in the coatings and the annealing temperature play a key role in the phase formation. The formation of Ti2AlN phase is suppressed by the increment of nitrogen concentration and promoted by the enhancement of annealing temperature. TEM results indicate that the formation of Ti2AlN phase is accompanied by the microstructure evolution from strong layered structure to fine equiaxed crystals in the process of heat treatment.
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