采用平面波展开和第一原理赝势法对4H-SiC理想晶体及与Vsi有关的电中性微观本征缺陷(Vsi、Vc-Vsi 、Vc-C、Vsi-Si)的超晶胞进行计算.结果发现:0 K且忽略原子驰豫时,电中性本征缺陷VC-C和Vsi的形成能相差为4.472eV,在此基础上分析了亚稳定型本征缺陷Vsi向稳定型本征缺陷Vc-C转化的理论依据及转化方式,首先发生转移的是h晶格位置上的Si原子,与非故意掺杂4H-SiC外延材料在氙光激励作用下的ESR结果吻合较好.
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