采用直流磁控溅射法在玻璃衬底上制备了高质量的Nb掺杂ZnO( NZO)透明导电薄膜.为了研究薄膜厚度对薄膜性质的影响,制备了五个厚度分别为239 nm,355 nm,489 nm,575 nm和679 nm的样品.XRD结果表明,ZnO∶ Nb薄膜是具有六角纤锌矿结构的多晶薄膜,并且具有垂直于衬底的c轴择优取向.随着膜厚的增加,薄膜的结晶质量明显提高.当厚度从239 nm增加到489 nm时,平均晶粒尺寸从19.7 nm增加到24.7 nm,薄膜的电阻率持续减小；当厚度进一步增加时,晶粒尺寸略有减小,电阻率有所增加.本实验获得的最低电阻率为4.896×10-4Ω·cm.随膜厚的增加,光学带隙先增大后减小.所有薄膜在可见光区域的平均透过率均超过88.3％.
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