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将水合碳酸铈与硝酸铝和氨水共同进行机械球磨,使新形成的无定型氢氧化铝包覆在细小的碳酸铈颗粒表面,经脱水干燥和煅烧,以制备出表面掺杂有氧化铝的氧化铈.结果表明:球磨中间产物仍然以水合碳酸铈为主,氢氧化铝的形成阻碍了碳酸铈的无定型化和向氢氧化铈的转化过程.在氧化铝掺杂量不超过10%的条件下,煅烧产物均具有立方萤石型结构.所有掺杂铝的氧化铈粉体对ZF7和K9光学玻璃的抛光速率均比纯氧化铈的有很大提高,证明铝的掺杂能够大大提高氧化铈的抛光性能.其最佳掺杂量为0.6%,煅烧条件为在1000℃下煅烧2 h.此时的MRR值为纯氧化铈的两倍以上.

参考文献

[1] 李永绣,周新木,辜子英,彭德院,胡平贵,周雪珍,焦晓燕,何小彬,魏坤,刘桂华.稀土抛光材料的生产、应用及其新进展[J].稀土,2002(05):71-74.
[2] Parshunun B Zantye;Ashok Kumar;Sikder A K .Chemical mechanical planarization for microelectranics applications[J].Materials Science and Engineering R:Reports,2004,45(3-6):89.
[3] Lim DS;Ahn JW;Park HS;Shin JH .The effect of CeO2 abrasive size on dishing and step height reduction of silicon oxide film in STI-CMP[J].Surface & Coatings Technology,2005(5/6):1751-1754.
[4] Rajendran A;Takahashi Y;Koyama M;Kubo M;Miyamoto A .Tight-binding quantum chemical molecular dynamics simulation of mechano-chemical reactions during chemical-mechanical polishing process of SiO2 surface by CeO2 particle[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2005(1/4):34-38.
[5] Hoshino T.;Terasaki Y.;Susa K.;Kurata Y. .Mechanism of polishing of SiO2 films by CeO2 particles[J].Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites,2001(1/3):129-136.
[6] 宋晓岚,李宇煙,江楠,屈一新,邱冠周.化学机械抛光技术研究进展[J].化工进展,2008(01):26-31.
[7] Feng XD;Sayle DC;Wang ZL;Paras MS;Santora B;Sutorik AC;Sayle TXT;Yang Y;Ding Y;Wang XD .Converting ceria polyhedral nanoparticles into single-crystal nanospheres[J].Science,2006(5779):1504-1508.
[8] 胡建东,李永绣,程昌明,柴明霞,冯晓平,周雪珍,辜子英.CeO2-ZrO2复合氧化物的制备及协同抛光性能[J].无机化学学报,2006(07):1354-1358.
[9] 辜子英,胡平贵,彭德院,焦小燕,周雪珍,李永绣.单分散球形超细氧化铈的机械化学反应制备法[J].中国有色金属学报,2003(03):783-787.
[10] Cheng C M;IA Y X;Zhou X Z;Chen W F .Preparation of well dispersed and ultra-fine Ce(Zr)O2 mixed oxide by mechanochemical process[J].Journal of Rare Earths,2004,22:771.
[11] Fu M S;Wei L H;Li Y H;Zhou X Z Hao S Y Li Y X .Surface charge tuning of ceria particles by titanium doping:Towards significantly improved polishing performance[J].Solid State Sciences,2009,11:2133.
[12] 傅毛生,李永绣,陈伟凡,危亮华,胡建东.Ce0.8Zr0.2O2固溶体磨料对ZF7光学玻璃抛光性能的改善[J].摩擦学学报,2009(02):180-185.
[13] 李永绣,程昌明,陈伟凡,胡建东,周雪珍,胡平贵,辜子英,周新木.水合醋酸铈直接热分解制备超细氧化铈及其抛光性能[J].无机化学学报,2006(04):733-737.
[14] 李永绣,周雪珍,王志强.Mechanochemical Reaction of Lanthanum Carbonate with Sodium Hydroxide and Preparation of Lanthanum Oxide Nanoparticle[J].稀土学报(英文版),2002(05):411-415.
[15] Li Y X;Zhou X Z;You X Z .Preparation of nano-sized CeO2 by the mechanochemical reaction of cerium carbonate with sodium hydroxide[J].Materials Letters,2004,58(12):245.
[16] 危亮华,傅毛生,李艳花,周雪珍,周新木,焦晓燕,李永绣.氯化钠和六偏磷酸钠对氧化铈抛光ZF7玻璃的协同增强作用[J].过程工程学报,2008(06):1241-1244.
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