采用单层和双层印刷法在氧化铝衬底上制备功能陶瓷厚膜用Pt电极, 研究了烧结温度、升温速率和电极厚度对Pt电极层的表面形貌、表面覆盖率和表面粗糙度的影响,以揭示晶粒长大、气孔生长及致密化机制. 结果表明, 在单层印刷Pt电极的烧结过程中,低温阶段残留的碳使不同温区Pt的主导扩散机制不同.双层印刷Pt电极中第一层在600℃下烧结后,印刷第二层再在1200℃下烧结具有最大表面覆盖率和最小平均粗糙度(其值约为0.82 um),同时具有最好的导电性能(方阻为0.044 Ω/□).
Single layer and double layer Pt bottom electrodes for functional ceramic thick films have been screen printed on alumina substrates. The effects of sintering temperature, heating rate, and thickness of the Pt electrode layer on the pattern, alumina surface coverage, and the roughness of the electrode layer have been studied. The mechanism of grain and pore growth and densification of the Pt layer is also demonstrated. The difference in activation energy and the diffusion can be due to the presence of carbon impurities, whick influences the diffusion of Pt at low temperatures. As the first layer sintered at 600℃, the double print Pt layers with sequential heat treatments at 1200℃ exhibt improved densification and surface coverage. The double print Pt layers with the minimum average roughness of 0.82μm and the smallest sheet resistivity of 0.044have been produced on alumina substrates.
参考文献
| [1] |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%