Phase Composition of Sputtered Film from a Mixture Target of Hydroxyapatite and Strontium-apatite

材料科学技术（英）, 2013, 29(1): 1-6.

^1, , ^2, , ^3, , ^4,

1.Department of Mechanical Engineering, Ibaraki University, 4-12-1, Nakanarusawa, Hitachi, Ibaraki 316-8511, Japan

2.Department of Mechanical Engineering, Ibaraki University, 4-12-1, Nakanarusawa, Hitachi, Ibaraki 316-8511, Japan

3.International Apatite Co., Ltd., 20 Kanda-Ogawamachi 3-Chome, Chiyoda-ku, Tokyo 101-0052, Japan

4.Department of Mechanical Engineering, Ibaraki University, 4-12-1, Nakanarusawa, Hitachi, Ibaraki 316-8511, Japan

基金项目: This research was partially supported by the Japan Science and Technology Agency,A-STEP (AS232Z01193F)

Phase Composition of Sputtered Film from a Mixture Target of Hydroxyapatite and Strontium-apatite

K. Ozeki ^1, , T. Hoshino ^2, , H. Aoki ^3, , T. Masuzawa ^4,

1.Department of Mechanical Engineering, Ibaraki University, 4-12-1, Nakanarusawa, Hitachi, Ibaraki 316-8511, Japan

2.Department of Mechanical Engineering, Ibaraki University, 4-12-1, Nakanarusawa, Hitachi, Ibaraki 316-8511, Japan

3.International Apatite Co., Ltd., 20 Kanda-Ogawamachi 3-Chome, Chiyoda-ku, Tokyo 101-0052, Japan

4.Department of Mechanical Engineering, Ibaraki University, 4-12-1, Nakanarusawa, Hitachi, Ibaraki 316-8511, Japan

Keywords： Sputtering

To obtain an Sr-substituted hydroxyapatite thin film,sputter-coating was performed on a cellulose filter acting as a substrate from the mixture target of hydroxyapatite (HA) and strontium-apatite (SrAp) at an Ar pressure of 0.5-5.0 Pa.The ratio of the SrAp in the mixture target was varied from 25％ to 100％.After coating,the films were heated at 700 ℃ to remove the cellulose filter substrate,and the crystalline phases were identified by X-ray diffraction (XRD).The sputter-coated film was identified as the Sr-substituted β-tri-calcium phosphate (TCP) and the Sr-substituted/β-calcium pyrophosphate (CPP) as well as the Sr-substituted HA.The weight ratio of the Sr-substituted HA decreased with increasing Ar pressure or with an increasing ratio of SrAp to HA in the target.The average Sr/(Ca + Sr) molar ratio in the film was 1.9％-3.5％ slightly lower than the initial SrAp ratio of the target,and the ratio was not influenced by the Ar pressure.In the (Sr + Ca)/P ratio,the ratio decreased while increasing the SrAp ratio in the target.

参考文献

[1]	C.T. Kwok;P.K. Wong;F.T. Cheng;H.C. Man .Characterization and corrosion behavior of hydroxyapatite coatings on Ti6A14V fabricated by electrophoretic deposition[J].Applied Surface Science,2009(13/14):6736.
[2]	S. Ligot;T. Godfroid;D. Music .Tantalum-doped hydroxyapatite thin films: Synthesis and characterization[J].Acta materialia,2012(8):3435-3443.
[3]	K. Ozeki;Y. Fukui;H. Aoki .Influence of the calcium phosphate content of the target on the phase composition and deposition rate of sputtered films[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2007(11):5040-5044.
[4]	B. G. Segda;M. Jacquet;J. P. Besse .Elaboration characterization and dielectric properties study of amorphous alumina thin films deposited by r. f. magnetron sputtering[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2001(1):27-38.

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Phase Composition of Sputtered Film from a Mixture Target of Hydroxyapatite and Strontium-apatite

参考文献