采用放电等离子烧结(spark plasma sintering,SPS)技术,添加不同含量CaF2为烧结助剂,成功制备了透明氮化铝(AlN)陶瓷.SPS技术具有烧结快速,烧结体致密度高的特点,是制备透明AlN的有效方法.CaF2的加入量的提高,有利于烧结体的致密度和透过率的提高.当CaF2加入量为3%(质量分数)时,烧结体致密度不再继续提高,但仍有利于透过率的提高,此时烧结体透过率最高为54.7%.SEM、XRD、TEM和EDX结果表明烧结体具有很高的致密度、纯度,均匀的晶粒形状和尺寸,晶界及三角晶界处观察不到第二相的存在,从而保证了烧结体良好的光学性能.
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