近年来,TiO2功能薄膜以其卓越的性能,尤其是优异的光催化性能,引起了国内外广泛关注.针对纳米TiO2功能薄膜气相沉积制备方法中影响TiO2薄膜结构的关键因素(如基体温度、退火温度、基片种类、氧分压、掺杂等)进行了系统总结,并介绍了其研究进展.
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