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提出了沉积纳米陶瓷薄膜的一种新方法一燃烧化学沉积法.该方法省去了真空条件;直接在空气中沉积纳米陶瓷薄膜.其主要特点是将配制好的初始液体雾化,让该液雾穿过高温火焰流体.初始液体在火焰流中发生化学反应,并形成反应火焰流,该反应火焰流体系在火焰流的前方基底上沉积出纳米陶瓷薄膜,然后再通过热处理进行晶化处理,使形成晶态相.本文以制备 α-Al纳米薄膜为例,介绍用该方法的制备过程,并用SEM和 TEM分析了。α-Al纳米薄膜的显微形貌和结构.

A new method for the preparation of nanocrystalline ceramic films was proposed, and α-Al2O3 films were deposited On a Ni-Al alloy substrate and then heat-treated, the films with nanocrystalline structure were characterized by SEM and TEM. The process of the new method is as follows: an initial liquid is atomized and travels through a high temperature flame, chemical reactions taking place, and deposited on a substrate, then the film obtained is heat-treated.

参考文献

[1] 张增志. 博士学位论文. 纳米陶瓷的燃烧化学沉积技术与机理研究. 北京: 中国矿业大学, 1996. 11.
[2] 刘宇, 邓永茜. 新型纳米晶材料. 硅酸盐通报, 1993, 12 (4): 47--52.
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