利用微弧氧化技术在钛衬底上直接制备了四方相钛酸钡铁电薄膜.利用X射线(XRD)、HP4192A阻抗分析仪和铁电测试系统(FTS)等手段对薄膜样品的相结构、介电和铁电性能进行了研究.结果表明,工艺参数为Ba(OH)2浓度为0.5mol/L,电流密度为150mA/cm2,温度为57℃,反应时间5～20min的薄膜主要要由四方相BaTiO3构成.在微弧氧化过程中,弧点的连续移动是形成四方相BaTiO3的主要原因.此工艺参数下薄膜的剩余极化值为0.271和-4.62μC/cm2(Pr),与其对应的矫顽场强度分别为20和-2.8kV/cm(Ec).该薄膜具有良好的铁电性能.
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