在原子层淀积的Al2O3薄膜表面自组装生长Au纳米颗粒，研究了Au纳米颗粒的自组装过程和热稳定性. 结果表明，原子层淀积的Al2O3薄膜表面很容易吸附氨丙基三甲基硅烷(APTMS), 有利于Au纳米颗粒的自组装, 生长出的Au纳米颗粒尺寸为5--8 nm, 密度约为4×1011cm-2. 在300℃氮气中退火使Au纳米颗粒的尺寸增大, 但是没有改变APTMS的吸附状态和Au的化学组成. 当退火温度提高到450℃时, Au纳米颗粒发生明显的团聚, 且分布变得极不均匀.
The self-assembly growth of Au nano-particles on atomic-layer-deposited (ALD) Al2O3 thin film has been achieved. And the self-assembly process and the thermal stability have been investigated.The results show that the ALD Al2O3 film is inclined to adsorb (3-Aminopropyl)-trimethoxysilane (APTMS), which is in favor of self-assembly growth of Au nano-particles. The resulting Au nano-particles are mainly in the range of 5–8 nm with a density of nearly 4×1011cm−2. The annealing at 300 in N2 leads to an increase in the dimension of Au nano-particles, however, the good adsorption of APTMS and the chemical compositions of Au nano-particles are maintained. When the annealing temperature elevates to 450 , Au nano-particles exhibit severe agglomeration together with extreme nonuniformilty.
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