介绍了聚对二甲苯(Parylene)薄膜在热、紫外光和γ射线中的老化行为及产物,讨论了一些老化现象的机理,提出了今后需要加强研究的方向.Parylene抗辐射能力最强,而抗紫外线能力最差,其老化主要表现在亚甲基的氧化与断裂.在125℃左右,开始出现较明显的热氧化,氧化速率与温度的关系符合Arrhenius关系式;在300nm的紫外光照射下发生较明显的降解,-Cl的存在对光解有加速作用;在空气气氛中,当γ辐照剂量超过50kGy后Parylene将发生明显的氧化,其耗氧量与辐照剂量近似呈线性关系,而且薄膜的熔融温度下降,透湿系数提高.
参考文献
| [1] | 陈曦,吴念曾,邵力为.C型聚对二甲苯狗动脉植入--血液相容性初步研究[J].中国生物医学工程学报,2000(02):206-212. |
| [2] | 陈曦.聚对二甲苯在电子领域中应用的新进展[J].电子工艺技术,2002(04):146-148. |
| [3] | Yang Lungjieh;Lin Weizhi;Yao Tzejung et al.Photo-patternable gelatin as protection layers in low-temperature surface micromachinings[J].Sensors and Actuators,2003,103:284. |
| [4] | Beach W F;Lee C;Bassett D R.‘Xylylene polymers'in encyclopedia of polymer science and engineering 2nd Edition[M].New York:John Wiley and Sons,1989:990. |
| [5] | 张占文,李波,王朝阳,余斌,林波.气相沉积法制备聚对二甲苯薄膜[J].材料导报,2003(06):86-87,83. |
| [6] | 张占文,钟志京,王朝阳,李波,余斌.热丝辅助裂解法制备聚对二甲苯薄膜[J].真空,2002(04):29-31. |
| [7] | Sean Pursel;Mark W.Horn;Melik C.Demirel;Akhlesh Lakhtakia .Growth of sculptured polymer submicronwire assemblies by vapor deposition[J].Polymer: The International Journal for the Science and Technology of Polymers,2005(23):9544-9548. |
| [8] | Granttan D W;Bilz M .The thermal aging of parylene and the effect of antioxidant[J].Studies in conservation,1991,36:44. |
| [9] | Nowlin T E;Smith D F et al.Thermal oxidative stability of poly-p-xylylenes[J].Journal of Polymer Science Part A:Polymer Chemistry,1980,18:2103. |
| [10] | Baker T E;Fix G L;Judge J S .Modified poly-paraxylylene coatings and films with improved oxidation resistance[J].Journal of the Electrochemical Society,1980,127:1851. |
| [11] | Lee S M.‘Xylylene polymers' in kirk othmer encyclopedia of chemical technology[M].New York:John Wiley,1997:744. |
| [12] | Gorham W F.A new general synthetic method for the preparation of linear poly-p-xylylenes[J].Journal of Polymer Science,Part A,1966(04):3027. |
| [13] | Alpaugh W A;Morrow D R.The thermal properties of monochloro-para-xylylene[J].Thermochimica Acta,1974(09):171. |
| [14] | Gilch H G;Wheelwright W L.Polymerization of α-halogenated p-xylenes with base[J].Journal of Polymer Science,Part A,1966(04):1337. |
| [15] | Huang Hongliang;Xu Yongan;Low Hong Yee .Effects of film thickness on moisture sorption glass transition temperature and morphology of poly (chloro-p-xylylene) film[J].Polymer,2005,46:5949. |
| [16] | Senkevich J J;Desu S B .Morphology of poly (chloro-p-xylylene) CVD thin films[J].Polymer,1999,40:5751. |
| [17] | Bera M.;Gandon C.;Gardette JL.;Rivaton A. .Comparison of the photodegradation of parylene C and parylene N[J].European Polymer Journal,2000(9):1765-1777. |
| [18] | Monk D J;Toh H S;Wertz J .Oxidative degradation of parylene C (poly (monochloro-para-xylylene[J].Sensors and Materials,1997,9(05):307. |
| [19] | Szwarc M .Poly-para-xylylene:Its chemistry and application in coating technology[J].Polymer Engineering and Science,1976,16:473. |
| [20] | Wu P K;Yang G R;McDonald J F et al.Surface reaction and stability of parylene N and F thin films at elevated temperatures[J].Journal of Eectronic Materias,1995,24:53. |
| [21] | Beach W F;Lee C;Bassett D R.‘Xylylene polymers'in Encyclopedia of polymer science and engineering[M].New York:Wiley,1989:195. |
| [22] | Mahoney D M .Parylene stabilization[P].US 4163828,1979-08-07. |
| [23] | Joesten B L .Thermogravimetry and differential scanning calorimetry of some poly-p-xylylenes containing halogen atoms[J].Journal of Applied Polymer Science,1974,18:439. |
| [24] | Dabral S.Alpha alpha′ alpha″ alpha(″′) poly-tetrafluorop-xylylene as an interlayer dielectric for thin film multichip modules and integrated circuits[J].Journal of Vacuum Science and Technology,1993(11):1825. |
| [25] | Hoyle C E;No Y G;Malone K G et al.Laser flash photolysis of a 4 4 '-methylenebis (phenyl isocyanate) (MID)based polyurethane and model carbamates[J].MACROMOLECULES,1988,21:2727. |
| [26] | Fortin J B;Lu T M .Ultraviolet radiation induced degradation of poly-para-xylylene (parylene) thin films[J].Thin Solid Films,2001,397:223. |
| [27] | 刘枫,沈军,秦仁喜,吴广明,周斌,肖轶群,吴兆丰.聚对二甲苯 /SiO2复合薄膜的制备及光学性能研究[J].功能材料与器件学报,2005(01):38-42. |
| [28] | Pauwels J;Gestel J V;Vandecasteele C .Irradiation test of thin substrate materials for nuclear targets[J].Nuclear Instruments and Methods in Physics Research,1985,236:65. |
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