Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films

材料科学技术（英）, 2015, 31(1): 55-64.

Dongli Qi ^1, , Hao Lei ^2, , Tiegang Wang ^3, , Zhiliang Pei ^4, , Jun Gong ^5, , Chao Sun ^6,

1.Surface Engineering of Materials Division, Institute of Metal Research, Chinese Academy of Sciences,Shenyang 110016, China

2.Surface Engineering of Materials Division, Institute of Metal Research, Chinese Academy of Sciences,Shenyang 110016, China

3.Surface Engineering of Materials Division, Institute of Metal Research, Chinese Academy of Sciences,Shenyang 110016, China

4.Surface Engineering of Materials Division, Institute of Metal Research, Chinese Academy of Sciences,Shenyang 110016, China

5.Surface Engineering of Materials Division, Institute of Metal Research, Chinese Academy of Sciences,Shenyang 110016, China

6.Surface Engineering of Materials Division, Institute of Metal Research, Chinese Academy of Sciences,Shenyang 110016, China

基金项目: This work was supported by the National Key Basic Research Program of China (973 Program,No.2012CB625100)and the National Natural Science Foundation of China (NSFC,No.51171197) and the Natural Science Foundation of Liaoning Province of China (No.2013020093).

Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films

Keywords： Cr-Mo-N films

参考文献

[1]	S. Louring;N.D. Madsen;A.N. Berthelsen;B.H. Christensen;K.P. Almtoft;L.P.Nielsen;J. Bottiger .Turbostratic-like carbon nitride coatings deposited by industrial-scale direct current magnetron sputtering[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2013(Jun.1):25-31.
[2]	C.P. Huggins;R.M. Nix .Growth and characterisation of Cr_2O_3(0001) thin films on Cu(111)[J].Surface Science: A Journal Devoted to the Physics and Chemistry of Interfaces,2005(1/3):163-173.
[3]	A. Leyland;A. Matthews .On the significance of the H/E ration in wear control: a nanocomposite coating approach to optimised tribological behaviour[J].Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear,2000(1/2):1-11.
[4]	J. L. Mo;M. H. Zhu .Tribological oxidation behaviour of PVD hard coatings[J].Tribology International,2009(11/12):1758-1764.
[5]	B SUBRAMANIAN;K PRABAKARAN;M JAYACHANDRAN .Influence of nitrogen flow rates on materials properties of CrN_x films grown by reactive magnetron sputtering[J].Bulletin of Materials Science,2012(4):505-511.

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Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films

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