为了提高反应等离子喷涂纳米TiN涂层的致密性、消除涂层内的微观缺陷,在大气、氩气氛和真空中对其进行了热处理.用XRD、SEM、TEM分析了纳米TiN涂层热处理后相组成及组织结构的变化,测试了处理后涂层的结合强度和孔隙率.结果表明:纳米TiN涂层在大气和氩气氛中,于600℃开始发生分解和氧化；真空环境下加热,涂层相组成不发生变化.在大气中600℃加热处理后,TiN涂层中微裂纹愈合,孔隙率降到原来的70％,结合强度基本不变.大气中1000℃热处理后,晶粒尺寸仍为100～200 nm.
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