为了了解热驱动薄膜式微型泵的性能,对泵的主要部件进行了分析,然后对泵的整体性能进行了模拟.得到了微型泵的频率特性及流量随功率的变化.发现泵的流量在3.3Hz左右达到最大.膜片的预应力对泵的性能有重要影响.功率小时,预应力使流量降低,功率大时,预应力使流量增加,泵的流量与输入功率的比值与输入功率的关系曲线有最大值,约在1.2～1.8W之间.实验测定了微型泵的频率和功率特性,模拟结果与实测结果基本吻合.
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