本文采用磁控溅射系统在非晶硅薄膜的表面沉积不同覆盖度的银纳米颗粒,并研究纳米颗粒的表面覆盖度对非晶硅薄膜光吸收特性的影响.结果表明随着纳米颗粒表面覆盖度的增加,薄膜的晶格结构并不受影响.但是,随着表面覆盖度的增加,薄膜在近红外区域内对光的吸收范围却发生了明显变化.当纳米颗粒的表面覆盖度达到8％时,薄膜在近红外区域内对光的吸收范围达到了最大.这主要是由于纳米颗粒的局域表面等离子体增强了光吸收.
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