利用热丝化学汽相沉积法生长出优异的金刚石薄膜.研究表明,金刚石的成核依赖于沉积点的尖锐度,薄膜的生长包括晶粒长大和薄膜上的二次成核及其生长,可用分层生长来描述.金刚石晶粒的生长由外延生长和二次成核及其生长组成,也是分层进行的.结果导致了金刚石晶体和薄膜的层状结构.
High quality diamond thin films were grown by hot finament chchcal vopr dopsition.Their microstructure and growth processes were studied by means of high-magnification scatring clectron miorosoopy. The study showed that nucleation of diamond was detetrine
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