为了提高固贴式薄膜体声波谐振器（SMR）的电学和声学品质,实现四面体非晶碳（ta-C）在体声波器件领域的新应用,建立了以ta-C为布拉格反射栅高声阻抗材料的SMR模型,利用MathCAD仿真研究布拉格反射栅层数对该SMR的谐振特性的影响以及ta-C中sp3杂化含量和高/低声阻抗层厚度偏差对SMR的品质因子（Q值）的影响。结果表明层数的增加提高了SMR的品质;ta-C薄膜sp3杂化含量越高,达到饱和Q值所需层数越少,当含量为80%时,至少需要6层（3对）布拉格反射层使SMR达到优异Q值;距离压电堆越近的高/低声阻抗层,其厚度偏差对Q值的影响越大,从而实现了高频率（8GHz）低损耗的SMR的设计。
To improve the electricity and acoustic quality of solidly mounted resonator（SMR）,realize the new application of tetrahedral amorphous carbon（ta-C） in the field of bulk acoustic wave device,a SMR was designed with ta-C as the high acoustic impedance Bragg reflector,which to simulate the effect of the Bragg reflector to the properties of SMR,as well as the influence of the sp3 fraction in ta-C and the error of thickness of high/low acoustic impedance layers on quality factor（Q） by MathCAD.The simulation results showed that the quality of SMR was improved with the increase of Bragg reflectors.With higher sp3 fraction,saturated Q factor can be reached with fewer layers,and there should be only six layers（three pairs） in order to get an excellent Q factor when the sp3 fraction in ta-C was 80%.The thickness error of high/low acoustic impedance layers closer to the piezoelectric stack had greater effect to Q factor.So the design of SMR with high frequency（8GHz） and low loss has been realized.
参考文献
| [1] | Qiu X;ZhuJ;Oiler J et al.[J].ApplPhyLett,2009,94(15):1917-1920. |
| [2] | XuWC;ChoiS;ChaeJ .[J].ApplPhy,2010,96(05):3703-3705. |
| [3] | Nirschl, M.;Schreiter, M.;V?r?s, J. .Comparison of FBAR and QCM-D sensitivity dependence on adlayer thickness and viscosity[J].Sensors and Actuators, A. Physical,2011(2):415-421. |
| [4] | Ruby R.IIE 2 Review and comparison of bulk acoustic wave GBAR,SMR technology[A].New York,2007:10291040. |
| [5] | AignerR.[J].世界电子元器件,2003(05):38-41. |
| [6] | Jose S;Hueting R J E.[J].Ultrasonics Symposi-um(IUS),2011(30):291-294. |
| [7] | Hassine N B;Mercier D;Renaux P.Self heating under RF power in BAW SMR and its predictive ID ther-mal model[A].Besancon,2009:237240. |
| [8] | Link M;Schierter M;Webber J et al.[J].IEEE T UItrason Ferr,2006,53(02):492-496. |
| [9] | Milyutin E;Gentil S;Muralt P .[J].Appl Phy,2008,104(08):084508-084508-6. |
| [10] | Robertson J .[J].Phys Star Sol,2008,205(09):2233-2244. |
| [11] | He Yu;Peng Li;John Robertson .Fabrication and bio-functionalization of tetrahedral amorphous carbon thin films for bio sensor applications[J].Diamond and Related Materials,2011(7):1020-1025. |
| [12] | Roch T;Lasagni A et al.[J].Thin Solid Films,2011,519(11):37563761. |
| [13] | ZhuJ Q;HanJC;HanX et al.[J].ApplPhy,2008,104(01):3512-3514. |
| [14] | Salgar S;Guntae Kim;Dae-Hyun Han.Modeling and simulation of the thin film bulk acoustic resonator[A].Arizona,2002:4044. |
| [15] | 金浩 .薄膜体声波谐振器（FBAR）技术的若干问题研究[D].浙江大学,2006. |
| [16] | Lakin K.M.;Kline G.R. .High-Q microwave acoustic resonators and filters[J].IEEE Transactions on Microwave Theory and Techniques,1993(12):2139-2146. |
| [17] | Nakamura K;Kanbara H.Theoretical analysis of a piezoelectric thin film resonator with acoustic quarter-wave multilayers[A].Pasadena,California,1998:876-881. |
| [18] | Neeraj Dwivedi;Sushil Kumar;H.K.Malik;Govind;C.M.S.Rauthan;O.S. Panwar .Correlation of sp~3 and sp~2 fraction of carbon with electrical, optical and nano-mechanical properties of argon-diluted diamond-like carbon films[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2011(15):6804-6810. |
| [19] | Chhowalla M;Robertson J et al.[J].Applied Physics,1997,81(01):139-145. |
| [20] | 许鸿彬,刘文.布喇格反射层对SMR性能影响的仿真分析[J].压电与声光,2010(06):929-932. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%