利用飞秒激光与原子力显微镜的针尖部分耦合进行加工,是有望突破衍射极限,实现多隧道结加工的技术.本文在室温大气环境下,利用微焦级别脉宽为130fs、波长800nm的飞秒激光照射镀有金薄膜的原子力显微镜的探针针尖,使其耦合产生局域场加强效应在PMMA薄膜表面加工出光栅状纳米图形.通过最大残差法计算了条纹高度和宽度的重复性百分比,计算得到高度和宽度的最大残差值分别为6.3%和2.9%.结果表明在文中所提供的加工条件下,原子力显微镜针尖耦合激光是一种有潜力的激光加工方法.
参考文献
| [1] | Serafetinides AA;Makropoulou M;Fabrikesi E;Spyratou E;Bacharis C;Thomson RR;Kar AK .Ultrashort laser ablation of PMMA and intraocular lenses[J].Applied physics, A. Materials science & processing,2008(1):111-116. |
| [2] | Yigui Li;Susumu Sugiyama .Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask[J].Microsystem technologies,2007(3/4):227-230. |
| [3] | C. Wochnowski;S. Metev;F. Vollertsen .Surface topography of planar PMMA grating structures produced by the UV-laser based phase mask method[J].Microsystem technologies,2006(9):846-853. |
| [4] | 刘建平,石锦霞,杨小敏,何平笙,杨海洋.薄层软刻蚀法制备PMMA微图案结构[J].高分子学报,2007(01):42-46. |
| [5] | Ahn, S;Kim, G .An electrosprayed coating process for fabricating hemispherical PMMA droplets for an optical diffuser[J].Applied physics, A. Materials science & processing,2009(1):125-131. |
| [6] | J. Wang;T. Cui .Design, simulation, fabrication, and characterization of a PMMA tunneling sensor based on hot embossing technique[J].Microsystem technologies,2005(6):452-455. |
| [7] | 李佳,陈良格,林华水,周勇亮,胡维玲,田昭武.CO2激光加工PMMA微阵列点样芯片[J].应用激光,2005(01):45-48. |
| [8] | F. Weisbuch;V.N. Tokarev;S. Lazare;C. Belin;J.L. Bruneel .Millimeter-long nanofibers of PMMA spun at super-high speed by ablation with a single pulse of a KrF excimer laser[J].Applied physics, A. Materials science & processing,2002(6):677-680. |
| [9] | A. Bartnik;H. Fiedorowicz;R. Jarocki;J. Kostecki;A. Szczurek;M. Szczurek .Ablation and surface modifications of PMMA using a laser-plasma EUV source[J].Applied physics, B. Lasers and optics,2009(4):727-730. |
| [10] | S. M. Huang;M. H. Hong;Y. F. Lu;B. S. Lukyanchuk;W. D. Song;T. C. Chong .Pulsed-laser assisted nanopatterning of metallic layers combined with atomic force microscopy[J].Journal of Applied Physics,2002(5):3268-3274. |
| [11] | Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy[J].Applied physics letters,2003(8):1146-1148. |
| [12] | W. L. Barnes;W. A. Murray;J. Dintinger;E. Devaux;T.W. Ebbesen .Surface Plasmon Polaritons and Their Role in the Enhanced Transmission of Light through Periodic Arrays of Subwavelength Holes in a Metal Film[J].Physical review letters,2004(10):107401.1-107401.4. |
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