热处理对TiAlCN涂层组织和性能的影响

材料热处理学报, 2009, 30(1): 131-134.

热处理对TiAlCN涂层组织和性能的影响

张旭海 ^1, , 陈倩栎 ^2, , 蒋建清 ^3, , 方峰 ^4, , 江静华 ^5, , 曾宇乔 ^6,

1.江苏省先进金属材料高技术研究重点实验室,东南大学材料科学与工程学院,江苏,南京,211189

2.江苏省先进金属材料高技术研究重点实验室,东南大学材料科学与工程学院,江苏,南京,211189

3.江苏省先进金属材料高技术研究重点实验室,东南大学材料科学与工程学院,江苏,南京,211189

4.江苏省先进金属材料高技术研究重点实验室,东南大学材料科学与工程学院,江苏,南京,211189

5.江苏省先进金属材料高技术研究重点实验室,东南大学材料科学与工程学院,江苏,南京,211189

6.江苏省先进金属材料高技术研究重点实验室,东南大学材料科学与工程学院,江苏,南京,211189

基金项目: 江苏省自然科学基金(BK2002062) 国家重大基础研究前期研究专项项目(2002CCA02000)

关键词： TIAlCN , 热处理 , 硬度

Effect of heat treatment on microstructure and performance of TiAICN coating

在Ar气条件下,对反应磁控溅射法制备的TiAlCN涂层进行500～1100℃热处理.采用XRD、Raman和DSC,研究不同热处理温度下涂层微观结构的变化,利用显微硬度计和划痕仪研究热处理对涂层性能的影响.结果表明,经600～800℃热处理后,涂层非晶碳相明显增加,使涂层形成纳米复合结构,这导致显微硬度显著增加,膜基结合性能增加;在900～1100℃热处理后,由于涂层中六方AlN相的析出,导致涂层显微硬度急剧下降,且韧性下降.

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