基于COMPASS分子力场,经过分子聚合,能量最小化和退火模拟等构建SU-8光刻胶模型.利用分子动力学的研究方法,模拟研究了SU-8胶的玻璃化转变温度及其主要的影响因素;同时计算了在室温条件下交联SU-8胶的杨氏模量、泊松比、剪切模量、体积模量等力学性能.结果表明,模拟得到的玻璃化转变温度和力学性能与实验结果相一致;非键能是导致非交联SU-8胶玻璃化转变的主要因素之一.
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