MEMS技术作为一种新兴的高端制造技术受到全球的重视,成为研究热点.随着TiAl合金薄膜的研究和应用发展,其优异的高温力学性能和抗腐蚀性能提高了MEMS系统的应用范围.阐述了TiAl合金薄膜的制备技术,生长模式和微观结构,并介绍了TiAl合金薄膜在MEMS上的应用研究进展.
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