GaN薄膜制备技术的研究进展

材料导报, 2010, 24(z1): 299-303.

GaN薄膜制备技术的研究进展

赵丹 ^1, , 梁建 ^2, , 赵君芙 ^3, , 马淑芳 ^4, , 张华 ^5, , 许并社 ^6,

1.太原理工大学新材料界面科学与工程省部共建教育部重点实验室,太原,030024;太原理工大学材料,科学与工程学院,太原,030024

2.太原理工大学新材料界面科学与工程省部共建教育部重点实验室,太原,030024;太原理工大学材料,科学与工程学院,太原,030024

3.太原理工大学新材料界面科学与工程省部共建教育部重点实验室,太原,030024;太原理工大学材料,科学与工程学院,太原,030024

4.太原理工大学新材料界面科学与工程省部共建教育部重点实验室,太原,030024;太原理工大学材料,科学与工程学院,太原,030024

5.太原理工大学新材料界面科学与工程省部共建教育部重点实验室,太原,030024;太原理工大学材料,科学与工程学院,太原,030024

6.太原理工大学新材料界面科学与工程省部共建教育部重点实验室,太原,030024;太原理工大学材料,科学与工程学院,太原,030024

基金项目: 山西省自然科学基金(2007011066) 山西省回国留学人员科研资助项目(2008-37)

关键词： GaN薄膜 , 制备技术 , 研究进展

Research Development on Deposition Technologies of GaN Thin Films

综述了近年来国内外GaN薄膜制备技术的研究进展,并重点介绍了其发展历程、所使用的设备和技术、各自的优缺点及应用前景.通过比较这些技术的优缺点展望了制备GaN薄膜技术的发展前景.

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