采用溶胶-凝胶法,以离子液体为辅助溶剂,在玻璃衬底上制备了ZnO:Al(ZAO)薄膜.通过X-射线衍射(XRD)、场发射扫描电镜(FE-SEM)、紫外-可见分光光度计(UV-Vis)和霍尔效应等测试手段,分析了不同Al掺杂浓度ZAO薄膜的微观结构、光学和电学性能.结果表明,所制备的薄膜为非(002)取向的多晶膜.随着Al离子掺杂浓度的提高,薄膜的(002)晶面取向增强,晶粒逐渐由片状向球形转变,电阻率先降低后升高.进一步研究发现,在还原气氛NH3下退火可显著降低薄膜的电阻率,Al掺杂浓度为1 mol%时,薄膜电阻率达到4.7×10-2Ω·cm,可见光透过率平均在80%以上.
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