光敏苯并环丁烯的合成研究

材料导报, 2007, 21(8): 56-62.

光敏苯并环丁烯的合成研究

王姣 ^1, , 唐先忠 ^2, , 赵松楠 ^3, , 李元勋 ^4,

1.电子科技大学电子薄膜与集成器件国家重点实验室,成都,610054

2.电子科技大学电子薄膜与集成器件国家重点实验室,成都,610054

3.中国工程物理研究院激光聚变研究中心,绵阳,621900

4.电子科技大学电子薄膜与集成器件国家重点实验室,成都,610054

基金项目: 四川省科技攻关项目(03GG009-002)

关键词：光敏 , BCB , 合成 , 分子设计

The Synthesis of Photo-Benzocyclobutene

光敏苯并环丁烯(BCB)以其优良的电特性、极低的吸水率以及能够大大简化器件制造工艺等优点成为微电子领域特别是用于多芯片组件(MCM)最理想的绝缘介质材料.介绍了目前光敏BCB的研究现状及应用情况,分析了两种常用的光敏BCB的结构和合成方法,并提出了一种新型光敏BCB的设计思路.

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材料期刊网

光敏苯并环丁烯的合成研究

The Synthesis of Photo-Benzocyclobutene

参考文献