以正硅酸乙酯、异丙醇、去离子水为原料,盐酸、氨水为催化剂,采用溶胶-凝胶、旋转涂胶、老化及超临界流体干燥工艺制备纳米多孔氧化硅薄膜.研究了溶胶-凝胶工艺的影响因素,考察了溶胶粘度和匀胶转速对成膜性能的影响,采用扫描电镜表征了薄膜的表面形貌和截面结构,用椭偏仪表征了薄膜的孔隙率、介电常数以及厚度等性能参数,分析了薄膜的结构和红外特性.
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