SOI材料的缺陷及其表征

材料导报, 2007, 21(3): 123-125.

SOI材料的缺陷及其表征

夏庆锋 ^1, , 杨德仁 ^2, , 马向阳 ^3, , 阙端麟 ^4,

1.浙江大学硅材料国家重点实验室,杭州,310027

2.浙江大学硅材料国家重点实验室,杭州,310027

3.浙江大学硅材料国家重点实验室,杭州,310027

4.浙江大学硅材料国家重点实验室,杭州,310027

基金项目: 教育部跨世纪优秀人才培养计划国家自然科学基金(60225010)

关键词：缺陷 , SOI材料 , 表征 , SIMOX

Defects in SOI Materials and Related Characterization

简述了利用注氧隔离法(SIMOX)制备的SOI材料中产生的一些不同于体硅材料的特殊缺陷,涉及表面缺陷、Si/SiO2界面缺陷和埋氧层缺陷,包括这些缺陷的产生机制、表征方法以及一些降低和消除措施.

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SOI材料的缺陷及其表征

Defects in SOI Materials and Related Characterization

参考文献