采用中频脉冲磁控溅射工艺制备ITO薄膜,研究了衬底温度和溅射功率对薄膜性能的影响.通过对二者的优化,获得了方阻为2.99Ω/□,电阻率为1.76×10-4Ω·cm,可见光波段(400～800 nm)平均透过率为82.3％的ITO薄膜.将优化后的薄膜用于电池上,制出了转化效率为14.04％的HIT太阳能电池.
参考文献
| [1] | Joachim Muller;Bernd Rech;Jiri Springer;Milan Vanecek .TCO and light trapping in silicon thin film solar cells[J].Solar Energy,2004(6):917-930. |
| [2] | 韩晓艳,宋行宾.薄膜太阳能电池用透明导电薄膜技术现状及发展趋势[J].新材料产业,2012(04):42-46. |
| [3] | Suzuki A.;Matsushita T.;Aoki T.;Mori A.;Okuda M. .Highly conducting transparent indium tin oxide films prepared by pulsed laser deposition[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(1):23-27. |
| [4] | El Rhaleb H.;Benamar E.;Rami M.;Roger JP.;Hakam A.;Ennaoui A. .Spectroscopic ellipsometry studies of index profile of indium tin oxide films prepared by spray pyrolysis[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2002(1/4):138-145. |
| [5] | Alam MJ.;Cameron DC. .Optical and electrical properties of transparent conductive ITO thin films deposited by sol-gel process[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(0):455-459. |
| [6] | 钟志有,张腾,顾锦华,孙奉娄.磁控溅射沉积掺锡氧化铟透明导电薄膜的光电性能研究[J].人工晶体学报,2013(04):647-652,670. |
| [7] | 江锡顺,万东升,宋学萍,孙兆奇.退火温度对ITO薄膜微结构和光电特性的影响[J].人工晶体学报,2011(06):1536-1540,1556. |
| [8] | Minami T .Transparent conducting oxide semiconductors for transparent electrodes[J].Semiconductor Science and Technology,2005(4):S35-S44. |
| [9] | Lee HW;Lau SP;Wang YG;Tse KY;Hng HH;Tay BK .Structural, electrical and optical properties of Al-doped ZnO thin films prepared by filtered cathodic vacuum arc technique[J].Journal of Crystal Growth,2004(3/4):596-601. |
| [10] | Kana MGZ;Centurioni E;Iencinella D;Summonte C .Influence of the sputtering system's vacuum level on the properties of indium tin oxide films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(1/2):203-208. |
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