目前关于提高红外热探测器吸收效率的研究，主要是上表面金属光栅结构的研究，该结构存在入射光被表面金属反射的问题。本研究提出了一种内部等离子体谐振吸收的红外探测器结构。分析了光栅及探测器结构参数对红外光学吸收的影响，采用COMSOL软件仿真，研究了介质-金属-介质-金属结构红外探测器的吸收效率，并通过结构参数的优化使吸收结构对特定红外波长的吸收率达到99.9%以上，在整个波长范围内平均吸收效率达37.4%。
Surface grating was used, as the common method, to improve the performance of the uncooled infrared sensor, which has the problem of high reflectivity. To improve the absorption efficiency of the uncooled infrared sensor, its structure of inner surface-plasmon-resonance is proposed in this paper. By COMSOL, the variation of the infrared absorption efficient with the structure parameters is simulated and analyzed. Absorption efficient of 99. 9% within a specified spectral band and 37. 4% averaged within the whole wavelength range is reached by parameter optimization.
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