采用瑞利波的特性评价了类金刚石涂层的质量.制备了3种试样,无涂层试样,完好试样,缺陷试样.得到了3种试样的瑞利波群速度频散曲线.结果表明,由于无涂层试样的群速度在不同频率下不变,表明该测量结果是可靠的.由化学气相沉积制备的类金刚石涂层的频散曲线表明,涂层对群速度有一定的影响,完好试样的群速度与缺陷试样的群速度随着频率的变化而变化,因此,泄漏瑞利波可以很好地作为评价类金刚石涂层质量的一种无损检测方法.
The capability of Rayleigh wave to be used as a tool for the evaluation of CVD DLC coating layer has been presented in this paper. In the study, one uncoated specimen and two CVD DLC coated specimen has been used and the dispersion curve of group velocities of leaky Rayleigh wave was measured. The dispersion curve of uncoated specimen shows that the group velocities were the same at different frequencies. This demonstrates that the measurement taken is true, as there is no coating layer affecting the group velocities at different frequencies. The dispersion curves of CVD DLC coated specimens on the other hand, show that the coating layer does affect the group velocities. We also manage to differentiate between "sound" specimen and "bad bonding" specimen as the "bad bonding" specimen show unevenness on its dispersion curve. In fact, this result shows the high capability of the leaky Rayleigh waves to serve as a tool for the nondestructive evaluation of interfacial bonding quality of CVD DLC coating layer.
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