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铌酸钾钠无铅压电陶瓷薄膜具有居里温度高、机电耦合系数高、介电常数低等优点,制备方法种类繁多.综述了铌酸钾钠薄膜的制备技术,包括溶胶一凝胶法、脉冲激光沉积法和磁控溅射法等;讨论了铌酸钾钠薄膜各种方法的制备工艺与功能性质的关系等,指出了各种制备技术的优缺点及发展现状;最后提出了目前铌酸钾钠薄膜制备及应用中存在的一些问题及今后的发展方向.

参考文献

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