采用磁场完全闭合状态和不闭合状态两种磁场组态分别沉积Cr镀层,并利用Langmuir探针诊断其放电等离子体,测量了离子密度、电子密度和电子温度(EED)在两种磁场组态中的分布规律.结果表明:磁场不闭合状态时的等离子体密度较低,而完全闭合状态显著增加了真空腔中部的带电粒子数目.两种不同磁场组态中Cr镀层的沉积速率在靶电流相同的情况下相近.其中不闭合状态的Cr镀层截面为粗大而疏松的柱状结构,表面较粗糙;而完全闭合状态的镀层的柱状生长受到阻碍,表面光滑、平整,致密性好.
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