本文以绒面处理的P型硅(111)为衬底,利用磁控溅射、蒸发镀膜和热氧化等技术制备Al/P(cryst-Si: H)/N(Al-Doped ZnO)/ITO结构的异质结太阳能电池,探讨ZnO薄膜的表面形貌、晶体结构以及衬底的可见光反射率等因素对其光电转化性能的影响.扫描电子显微镜分析显示,氧化锌薄膜是具有大量晶界的多孔隙结构.X 射线衍射测试表明,氧化锌薄膜为六方纤锌矿晶体结构.太阳能电池的I-V特性测试显示,在绒面处理的硅基上制备的ZnO异质结太阳能电池具有较好的光伏特性,开路电压VOC为328 mV,短路电流密度JSC 为5.83 mA/cm2,填充因子FF为0.602.
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