基于双周期性电容加载共面波导传输线的移相器结构,系统研究了温度变化对铁电薄膜移相器移相能力、传输损耗的影响.调整温度可以在一定的范围内实现对移相器性能指标的微调.给出了加载因子对移相能力的示意曲线图,并在实验上,借助氩离子刻蚀技术,改变加载因子的大小,使得移相器的优值从原来的13degree/dB提升到23degree/dB.
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