借助激光标记的方法,对采用高功率直流电弧等离子体喷射法制备的金刚石膜中的黑色缺陷进行了定点表征.结合使用光学显微镜、激光扫描共焦显微镜、扫描电子显微镜、电子背散射衍射技术等多种表征方法,对同一样品的特定微观标记区域进行了多角度的分析.实验结果表明:金刚石膜内部的黑色缺陷是一种存在于晶界处的孔洞与质量较低的金刚石相的复合体,它的形成应与金刚石膜中某些晶界处的生长环境有关.
Dark features in diamond films prepared by DC arc plasma jet method were investigated by a laser marking process and fixed-point characterization. Optical microscopy, laser confocal scanning microscopy, scanning electron microscopy and electron backscattering diffraction methods were employed to analyze the defects at the same point. The results indicated that the dark features were such a kind of defects that embody pores and poor quality diamond phase located at grain boundaries of diamond films. The formation of the defects is related with the growth environment of the diamond films at specific grain boundaries.
参考文献
| [1] | Adam W;Bauer C;Berdermann E et al.Review of the Development of Diamond Radiation Sensors[J].Nuclear Instruments and Methods in Physics Research Section A (Accelerators Spectrometers Detectors and Associated Equipment),1999,434:131-145. |
| [2] | V. I. Polyakov;A. I. Rukovishnikov;N. M. Rossukanyi;A. I. Krikunov;V. G. Ralchenko;A. A. Smolin;V. I. Konov .Photodetectors with CVD diamond films: electrical and photoelectrical properties photoconductive and photodiode structures[J].Diamond and Related Materials,1998(6):821-825. |
| [3] | V.I. Polyakov;A.I. Rukovishnikov;N.M. Rossukanyi .Photoconductive and photovoltaic properties of CVD diamond films[J].Diamond and Related Materials,2005(3/7):594-597. |
| [4] | B.M. Garin;V.I. Polyakov;A.I. Rukovishnikov .Dielectric loss and energy distribution of the shallow levels in CVD diamonds[J].Diamond and Related Materials,2006(11/12):1917-1920. |
| [5] | Xuantong Ying;Xinmin Xu .CVD diamond thin film for IR optics and X-ray optics[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(2):297-299. |
| [6] | M. C. Roosi;S. Salvatori;F. Galluzzi;F. Somma;R. M. Montereali .Diamond photoluminescence spectra: dependence on excitation energy and microstructure[J].Diamond and Related Materials,1998(2/5):255-260. |
| [7] | J. X. Yang;X. F. Duan;F. X. Lu .The influence of dark feature on optical and thermal property of DC Arc Plasma Jet CVD diamond films[J].Diamond and Related Materials,2005(10):1583-1587. |
| [8] | Karen M .Microvoids in Polycrystalline CVD Diamond[J].Materials Research Society,2000,588:283-289. |
| [9] | K. Meykens;K. Haenen;M. Nesladek;L. M. Stals;C. S. J. Pickles;R. S. Sussmann .Measurement and mapping of very low optical absorption of CVD diamond IR windows[J].Diamond and Related Materials,2000(3-6):1021-1025. |
| [10] | 郭世斌;王耀华;陈飞 等.DC Arc Plasma Jet CVD 金刚石自支撑膜的质量对物理性能的影响[J].功能材料,2007,38(增刊):3802-3805. |
| [11] | Vartapetov SK;Zhigalkin AA;Lapshin KE;Obidin AZ;Khomich VY;Yamschikov VA .Study of an electric-discharge molecular fluorine VUV laser[J].Quantum electronics,2006(5):393-398. |
| [12] | Kilin SY.;Maevskaya TM.;Drabenstedt A.;Wrachtrup J.;Nizovtsev AP. .Spectroscopy on single N-V defect centers in diamond: tunneling of nitrogen atoms into vacancies and fluorescence spectra[J].Journal of Luminescence: An Interdisciplinary Journal of Research on Excited State Processes in Condensed Matter,2000(3-4):201-206. |
| [13] | A. Wotherspoon;J. W. Steeds;B. Catmull;J. Butler .Photoluminescence and positron annihilation measurements of nitrogen doped CVD diamond[J].Diamond and Related Materials,2003(3-7):652-657. |
| [14] | K. Iakoubovskii;G.J. Adriaenssens;Y.K. Vohra .Nitrogen incorporation in CVD diamond[J].Diamond and Related Materials,2001(3-7):485-489. |
| [15] | Haubner R;Lux B .Deposition of Ballas Diamond of Nano-crystalline Diamond[J].International Journal of Refractory Metals and Hard Materials,2002,20(01):93-100. |
| [16] | Takayuki T;Yasuo K;Masanori M .Field Emission of Polycrystalline Diamond Films Grown by Microwave-plasma Chemical Vapor Deposition I Effects of Surface Morphology of Diamond[J].Diamond and Related Materials,2002,11:1897-1904. |
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