为了能在石英玻璃管上获得一层具有一定电阻值的薄膜用以制备离子加速器,采用复合电沉积的方法进行,以化学镀Ni-P合金的石英玻璃管为基体,以硫酸镍为主盐的电镀液中加入二氧化硅纳米级微粒,通过复合电沉积的方法获取了在基体表面呈弥散分布的Ni-P-SiO2 复合镀层,讨论了各参数(阴极电流密度,镀液成分等)与电阻之间的关系,用扫描电镜(SEM)、X射线衍射(XRD)、能谱(EDX)等手段对涂层表面形貌、微观结构进行检测,并且使用万用电表和SDHC型数字点式测量仪对表面电阻率进行了分析测量,实验结果表明,通过复合电沉积的方法可以使得不导电的石英玻璃管表面形成具备一定电阻值的电阻薄膜,并且电阻率大小与镀层中二氧化硅含量的成正比关系.随着二氧化硅含量的增加,电阻率可达到6.017×103μΩ·cm.
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