Ba0.9Sr0.1TiO3薄膜的椭偏光谱研究

无机材料学报, 2001, 16(2): 305-310.

Ba_0.9Sr_0.1TiO₃薄膜的椭偏光谱研究

阳生红 , 李辉遒 , 张曰理 , 莫党 , 田虎永 , 罗维根 , 蒲兴华 , 丁爱丽

1.1. 中山大学物理系, 广州 510275

2. 2. 中国科学院上海硅酸盐研究所无机功能开放实验室, 上海 200050

1.1. Department of Physics

Zhongshan University

Guangzhou 510275

China

2. 2. Laboratory of Functional Inorganic Materials

Chinese Academy of Science, Shanghai 200050, China

关键词：椭偏光谱 , optical constant spectra , BST films

Spectroscopic Ellipsometry Studies of Ba_0.9Sr_0.1Ti0₃ Thin Films

YANG Sheng-Hong , LI Hui-Qiu , ZHANG Yue-Li , MO Dang , TIAN Hu-Yong , LUO Wei-Gen , PU Xing-Hua , DING Al-Li

Keywords： spectroscopic ellipsometry , 光学常数谱 , BST薄膜

用椭偏光谱仪首次在光子能量为２．１～５．２ｅＶ的范围内，测量了不同热处理温度下Ｂａ_０．９Ｓｒ_０．１ＴｉＯ_３（ＢＳＴ）薄膜的椭偏光谱，建立适当的拟合模型，并用Ｃａｕｃｈｙ色散模型描述ＢＳＴ薄膜的光学性质，用最优化法获得了所有样品的光学常数（折射率η和消光系数κ）谱及禁带能Ｅ_ｇ．比较这些结果，初步得到了ＢＳＴ薄膜的折射率η、消光系数κ和禁带能Ｅ_ｇ随退火温度变化的变化规律．

Ellipsometric spectra of Ba_0.9Sr_0.1TiO₃ (BST) thin films with various annealing
temperatures were measured in the range of photon energy from 2.1 to 5.2eV. Constructing appropriate fitting models and describing optical properties
of the BST with Cauchy dispersion model, their optical constants (refractive index n and extinction coefficient k) spectra and band
gap E_g were determined by means of an optimization. Compared these results, we obtained the variation of the refractive index n,
the extinction coefficient k and the band gap E_g with annealing temperatures.

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