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The corrosion behaviour of annealed CNx/TiNy multilayers have been investigated using potentiodynamic test in a 0.5MH2SO4 solution. The coating has been deposited on W6Mo5Cr4V2 steel by reactive magnetron sputtering and then annealed at different temperature. The annealed multilayers showed superior corrosion resistance as compared to the as-deposited coating. The corrosion model of annealed CNx/TiNy multilayers has been set up.

参考文献

[1] Liu A Y;Cohen M L .Prediction of New Low Compressibility Solids[J].Science,1989,245:841-842.
[2] Liu C S;Wu D W;Fu D J .Multilayer CNx/TiN Composite Films Prepared by DC Reactive Magnetron Sputtering[J].Surface and Coatings Technology,2000,128:144-148.
[3] Drusedau TP.;Neubert T.;Panckow AN. .The properties of aluminum oxide and nitride films prepared by d.c. sputter-deposition from metallic targets[J].Surface & Coatings Technology,2003(0):164-168.
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