利用Monte Carlo方法分别模拟了在SrTiO3基底上沉积MgO薄膜和在MgO基底上沉积SrTiO3薄膜.模拟中,选取与实验中薄膜生长相近的参数条件,引入了新的参数扩散势垒,得到了在晶格正失配(张应力)和负失配(压应力)下薄膜生长的形貌图以及薄膜粗糙度的变化曲线图,分析了张应力和压应力对薄膜生长形貌的影响.模拟结果与文献报道的外延薄膜生长模式的实验观察结果一致.
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